The Australian National Fabrication Facility was established under the National Collaborative Research Infrastructure Strategy (NCRIS) in 2007 to provide Australian researchers from both the public and private sectors with access to micro- and nano-fabrication tools and services. One of eight Nodes within the national network, the NSW Node (ANFF-NSW) offers advanced nanofabrication capability in cleanrooms and laboratory spaces spanning 750m2.

At the heart of the ANFF-NSW laboratories are three electron beam lithography systems, all capable of producing sub-20nm device features. This capability is supported by a full Si-MOS process line (high temperature furnaces for oxidation, diffusion and annealing; photolithography; a range of deposition and etching tools; and dicing, packaging and bonding capability) as well as additional tools allowing MOS-incompatible processes to run in parallel. The Node also operates a suite of molecular beam epitaxy systems producing ultra-low-disorder III-V heterostructure material as well as a wide range of high quality complex oxide layers and nanocomposites.

One of the key services provided by ANFF-NSW is the provision of advanced nanofabrication training for research students and staff. Training programs are customised to suit each researcher’s individual project requirements and are most often delivered in one-on-one sessions with ANFF-NSW process engineers. ANFF-NSW staff are also available to perform processing and development work on behalf of researchers.

Around 250 researchers make use of the ANFF-NSW laboratories each year, representing a diverse range of research disciplines including electronics, quantum technologies, photonics, clean energy technologies, biomedical devices and medical sensor technologies.

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