Leonard Borucki

Dr. Borucki was the Chief Technology Officer of Araca Incorporated from 2006 to 2017. He was responsible for intellectual portfolio development, new applications, prototype hardware engineering and construction, analysis software development, data analysis, sales and customer technical support. Prior to acquisition by Araca of his consulting company, Intelligent Planar, he was an independent contractor specializing in the application of physics and mathematical modeling to chemical-mechanical planarization. Dr. Borucki has BS and PhD degrees in mathematics from Rensselaer Polytechnic Institute.

After graduation, he taught applied mathematics and statistics at Lafayette College. He then worked for IBM for 7 years, where he was the primary developer of a finite element program used extensively by IBM for process development. Following IBM, he was employed by Motorola for 13 years, where he was Fellow of the Technical Staff. At Motorola, he developed and applied new physical models for different aspects of chemical-mechanical polishing, including pad conditioning and abrasive wear, pad lifetime optimization, pad heating, oxide and copper feature-scale planarization and tiling, polish rate decay, within wafer polish rate uniformity control, and slurry hydrodynamics. He holds patents in both CMP and SiGe transistor manufacturing and has authored numerous journal papers and proceedings papers.