Alex Yuan is a Function Cluster Architect at ASML since August 2011, specializing in EUV source laser systems, particularly in the FC72 Beam transport and positioning. With a strong background in project and optics architecture, Alex has led significant projects within the EXE5000 program and contributed as the lead architect for the EUV Focus Unit. Previous roles include responsibilities as a Lead Engineer and Team Lead for various optical and metrology aspects of EUV sources, collaborating across multiple sectors and managing project teams. Alex holds a Ph.D. in Physics from Eindhoven University of Technology and a Master's Degree in Photonics from KTH Royal Institute of Technology.
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