Erik Wallerbos

Erik Wallerbos is the Metrology College Leader at ASML, where they specialize in stage position measurement, mathematical modeling, calibration of model parameters, and statistics. They have held various roles at ASML—including Metrology Image Quality Architect and team lead for algorithm development—contributing significantly to wafer fabrication applications. Erik also has experience as an experimental physicist at the Paul Scherrer Institut and has completed a post-doctorate at Delft University of Technology. They hold a PhD in Physics from Delft University of Technology and a Master's degree in Physics from the University of Twente.