Ilya Kuznetsov, PhD, is a staff DUV source performance engineer at ASML, with a robust background in surface metrology, analytical instrumentation, and data analysis. Ilya has previous experience as a staff development engineer at Illumina from 2022 to 2024, and served as a senior system performance engineer at ASML from 2018 to 2022, focusing on stable 13.5 nm light generation for EUV lithography scanners. Prior to that, Ilya held the position of senior lithography engineer at GLOBALFOUNDRIES in 2018 and worked as a research assistant at Colorado State University from 2009 to 2018, specializing in EUV imaging mass spectrometry. Ilya earned a Doctor of Philosophy in EUV laser ablation mass spectrometry from Colorado State University, following a Master's degree in Power Engineering from Bauman Moscow State Technical University.
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