Shufeng Bai

Functional Cluster Architect (Overlay Mark Optimization)

Shufeng Bai is a Senior Principal Software Engineer at ASML, where they have held various roles since 2018, including Principal Software Engineer and Engineering Manager. With a strong background in algorithm design, modeling, numerical simulation, and high-performance computing, they specialize in engineering solutions for computational lithography and metrology. Shufeng completed their Ph.D. in Electrical Engineering from Princeton University, where they also earned a Master of Arts in the same field, following a Bachelor's degree in Physics from Peking University.

Location

Santa Clara, United States


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