Stephen D. Hsu

Stephen D. Hsu is a Senior Fellow and Director of the RET/SMO Product Engineering Group at ASML, with a career spanning over two decades at the company since January 2000. Responsibilities include leading product development for source mask optimization and design rule generation, along with defining product requirements and developing qualification plans. Prior roles at ASML encompass serving as a Senior RET Development Manager and Senior RET/OPC Manager, where achievements include leading teams to launch products on time and execute lithography projects across various technology nodes. Previously, Stephen D. Hsu worked as a Senior Staff Application Engineer at KLA-Tencor and as a Staff Process Engineer at National Semiconductor FRC. Stephen D. Hsu obtained a degree from the University of Utah between 1987 and 1990.