Vincent Shu

Vincent Shu is an experienced Principal Engineer and Manager specializing in Advanced OPC product engineering and computational lithography, currently at ASML since 2007. With a background in the semiconductor industry, they previously held significant roles at Chartered Semiconductor (now Global Foundries), Cypress Semiconductor Corporation, and 3M. Having contributed to pioneering efforts in computational lithography, Vincent has been instrumental in developing cutting-edge techniques and collaborating with leading mask-making companies. They hold a Ph.D. focused on Computer Vision Inspection and Opto-electronic Sensors from the University of Science and Technology of China and have completed a BS and MS in Mechanical, Optical, and Material Engineering from Nanjing University of Aeronautics and Astronautics.