Yilun Liu

Yilun Liu is a Staff Controls Engineer at ASML, specializing in EUV light source plasma control and laser beam motion control. With over ten years of experience in controls and machine learning, Yilun has developed advanced control technologies for Cummins diesel engines and received two awards for excellence in controls development. Yilun holds a Ph.D., an M.S. in Mechanical Engineering from the University of Florida, and a B.E. in Mechanical Engineering from Shanghai Jiao Tong University.