Beamfox Proximity provides state-of-the-art proximity effect correction and data preparation for electron-beam lithography in a user-friendly software package. Our extremely fast and accurate core algorithm developed by researchers at the Niels Bohr Institute in Copenhagen enables researchers in nanotechnologies to accelerate their research. Beamfox Proximity is the most user-friendly proximity effect correction solution on the market and integrates seamlessly with electron-beam writers from the major electron-beam writer brands, with support for all electron-beam writers through layered GDS.

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