Philippe Foubert is a Principal Scientist at IMEC, where they focus on process optimization for immersion and EUV lithography, as well as metrology and optical thin film characterization. Having led the Advanced Litho Equipment team, Philippe manages projects involving lithography and metrology equipment suppliers. Philippe previously served as an R&D team leader for advanced lithography process development from 2016 to 2024, and worked as an R&D engineer at IMEC from 2004 to 2016, specializing in lithography processes and optical measurements. They earned a doctorate in Chemistry from KU Leuven, where they were a PhD student from 1997 to 2003.
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