+ microfab Service  - MEMS Service provider
microfab is a service provider in the field of silicon-based micro-systems technology and a global supplier of customised microsystems, developements and transfers.
microfab is partner for producing microsystems components - both in the form of prototypes and engineering samples as well as in small and after transfer to a contract manufacturer in large volumes.

++ MEMS Foundry – Service provider and more
microfab is a independent Service Provider in the field of silicon-based micro-systems technology and a global supplier of customised microsystems. Production lines, located in two Class 10 to 100 cleanrooms, feature state-of-the-art facilities that permit wafers of 100 to 150 mm to be processed. With quality as a top priority, microfab has achieved certification wich includes DIN EN ISO 9001:2008.
microfab applies well established technologies for wafer processing and manufacturing of customer-based MEMS/microsystems, such as bulk micromachining including deep trench silicon etch DRIE, surface micromachining based on stress-controlled PECVD and LPCVD layers, wafer bonding (anodic and silicon direct) or electroplating of gold and other metals and alloys.

+++ MEMS Products – Knowledge & Experience
Reference projects include Silicon Microphones, Pressure Sensors and Ultrasonic Transducers, to name but a few.

microfab Service GmbH

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