Tom Larson

VP, Cooperate Development at Nova

Mr. Larson was appointed as Vice President of Cooperate Development in 2021. In this role, Tom is responsible for Nova’s inorganic growth strategy, including M&A and business development. Tom has more than 30 years of multidisciplinary technology semiconductor experience. Mr. Larson joined Nova in 2015 with Nova’s acquisition of Revera, the company he co-founded in 2004. ReVera acquisition by Nova formed the basis of the company’s Materials Metrology Division, where Mr. Larson led the product marketing strategy and roadmap execution until moving into the Business Development Group in 2019. Before ReVera, Mr. Larson served in various technical and business executive roles at Applied Materials, Schlumberger, KLA, and Tencor Instruments. His experience includes defining, launching, and driving innovative multidisciplinary products in the fields of advanced process and process control technologies. He holds a BS in Physics from Arizona State University and post-graduate work in the Master’s program at San Francisco State University.

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  • VP, Cooperate Development

    Current role

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