Purity ReSource provides solvent wastewater recovery systems and hazardous equipment cleaning services to the semiconductor industry. Our technologies help manufacturers reduce water and chemical use through high-purity, closed-loop solutions that prioritize both cost savings and environmental performance.

We specialize in cleaning vessels used in Atomic Layer Deposition (ALD) and Chemical Vapor Deposition (CVD)—offering a dedicated cleaning service that operates independently of chemical filling. This addresses a key industry gap while improving equipment longevity and reducing contamination risk. Our services are trusted by over a dozen leading chip manufacturers and backed by ISO 9001 and 14001 certification.

In parallel, we are co-developing membrane-based solvent wastewater recovery systems with a global OEM. These systems are designed for seamless fab integration and support long-term goals in sustainability, cost-efficiency, and resource resilience.

Purity ReSource Inc.

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