scia Systems manufactures advanced ion beam and plasma processing equipment, for the production of microelectronics, MEMS and precision optical components, in both, high volume production as well as in research and development environments. Due to their flexible and modular design, several vacuum process chambers can be combined into cluster or in-line solutions, according to customer-specific requirements.

scia Systems provides design, development, manufacturing and after-sales service together with its worldwide network of sales and service partners.

Technology Portfolio

► Ion Beam Trimming (IBT)
► Ion Beam Etching and Milling (IBE/IBM)
► Dual Ion Beam Deposition (DIBD)
► Plasma Enhanced Chemical Vapor Deposition (PECVD)
► Reactive Ion Etching (RIE)
► Magnetron Sputtering
► Plasma Cleaning

scia Systems GmbH

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