• SEMI

TG

Thomas Grebinski

Chair OASIS Standards Committee

Thomas Grebinski is the CEO and founder of Yotta Data Sciences, a position they have held since 2004. Known for their pioneering contributions to semiconductor Atomic Layer Deposition (ALD) and Integrated Circuit Design, they coined the term ALD in 1984 and hold the first ALD patents as well as the registered trademark OASIS®. Their extensive experience includes roles at Mycronic, Akrion Systems, and Entegris, Inc., among others. Thomas also served as the Chair of the OASIS Standards Committee and is currently pursuing a Bachelor of Science degree in Chemistry from Michigan Technological University.

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Alamo, United States

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