SENTECH develops, manufactures, and globally sells innovative capital equipment centered on thin films in semiconductor technology, microsystems, photovoltaics, nanotechnology and materials research.  SENTECH is expert in structuring and deposition of thin films by means of plasma process technology. SENTECH offers systems for plasma etching, plasma enhanced chemical vapour deposition, and atomic layer deposition. SENTECH provides innovative solutions for non-contact, non-invasive optical characterization using ellipsometry and reflectometry.

Founded in 1990, SENTECH is a reliable partner to industry and scientific institutions with leading edge equipment, global sales and service network. 

SENTECH consists of the R&D and manufacturing company SENTECH Instruments located in Berlin and SENTECH Gesellschaft für Sensortechnik operating from Krailling near Munich.

SENTECH Instruments GmbH

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