• TNO

AU

Andrey Ushakov

Senior Scientist

Andrey Ushakov is a seasoned plasma physics expert with extensive experience in developing advanced technologies for various applications. Currently serving as a Senior Scientist at TNO since January 2014, Ushakov previously held significant roles, including Senior Development Engineer at XTREME technologies GmbH in Germany and Principal Engineer positions at SEMES and Samsung Electronics, where innovative plasma solutions for nanolithography and ULSI fabrication were advanced. Early career contributions were made at the Russian Research Center "Kurchatov Institute" and Korea Vacuum Tech, focusing on plasma technology development and research. Ushakov holds a PhD in plasma physics from the Kurchatov Institute and an MSc from the National Research Nuclear University MEPhI.

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