Shirley Chen

Senior EUV Photolithography Process (beol) Engineer

Shirley Chen is a Senior EUV Photolithography Process Engineer at TSMC, with expertise in manufacturing processes and technology ramp-up, including the successful qualification of the 4nm technology node and the 5nm AI chip advanced processes. Previous roles include Associate Test Engineer at Molex, where evaluations of connector performance and failure analysis were conducted, and Research Assistant at the Material Science Department's Shen Dillon Research Group, contributing to innovative lithium-ion battery research and co-authoring a published manuscript. Additional experience includes engineering assistance at Ameresco and research assistance at UIUC RailTEC. Shirley holds a Bachelor's degree in Materials Science & Engineering from the University of Illinois Urbana-Champaign.

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