Yu Xu

Yu Xu is a Senior Process Engineer II at ASM since August 2019, specializing in thermal ALD process development for high-volume manufacturing, as well as dielectric and ALD equipment. Prior roles include Senior Process Engineer I at ASM with focuses on thermal ALD and R&D for plasma-enhanced ALD and CVD. Previously, Yu served as a Postdoctoral Researcher at the Centre national de la recherche scientifique and as a PhD Fellow at DTU Energy, concentrating on nanomaterials for electrochemical applications. Academic experience includes a guest PhD position at the University of Duisburg-Essen and a master's degree from the Chinese Academy of Sciences, along with a bachelor’s degree from Tsinghua University. Yu holds a PhD in Material Science from DTU and both MSc and BSc degrees in Material Science and Engineering from the University of Science and Technology Beijing.