Kourosh Nafisi

D&e System Performance, Inspection: Group Lead

Kourosh Nafisi is a seasoned professional in the fields of metrology and inspection, currently serving as the Group Lead of D&E System Performance at ASML since February 2024. Nafisi has held significant roles at Applied Materials from July 2021 to February 2024, including Director of Metrology & Inspection for Photonics Platforms and Engineered Optics Team, and previously served as Sr. Manager of Metrology and Inspection within the Office of the CTO. Nafisi's experience at ASML prior to the current role includes Project Cluster Manager and Manager of the Product Engineering Group, along with roles in product integration. Earlier career highlights include positions at Applied Materials as a Process Metrology Engineer and at IBM in various engineering capacities, contributing to process modeling, lithography, and patterning. Nafisi holds a PhD in Chemistry from UC Irvine and a BS in Chemistry/Materials Science from UCLA.

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