Founded in 2018, Cygnus Photonics is dedicated to providing precision UV and VUV photolithographic systems and exposure tools to electronic, photonic, and biomedical device and system manufacturers as well as the research and educational communities. Several breakthroughs in UV/VUV source technology have opened the door to a new level of performance in photolithography while dramatically reducing the system cost-of-ownership, relative to conventional UV exposure tools. Based on flat, efficient deep-UV and VUV lamps developed over the past decade, Cygnus systems offer exceptional value because, for example, operating 172 nm photolithographic systems in vacuum is not necessary. The ultrathin lamps are not only efficient and more powerful than VUV lamps of the past, but they can also be “tiled” so as to produce uniform irradiation of a surface over areas up to 1 m^2. Owing to the unique technology underlying our photolithography systems, Cygnus offers modular exposure tools capable of processing wafers up to 8 inch (200 cm) diameter (300 mm system is under development). Smaller systems, such as the π-Photon, are designed specifically as compact and inexpensive solutions for industrial research groups and university laboratories. The rapid rise in the cost of photolithography systems over the past two decades has restricted access to state-of-art technology, and the mission of Cygnus Photonics is to offer high performance VUV/UV exposure and patterning tools priced for researchers and educators. Today. Cygnus Photonics products are at work in manufacturing and testing facilities, and industrial and university research laboratories in Europe, Asia, and the USA.

Cygnus Photonics

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