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Ben Tsai

CTO & EVP, Corporate Alliances at KLA

Ben Tsai is responsible for spearheading KLA’s technology roadmap, strategic technology sourcing, corporate alliances and venture investments.

In over 20 years at KLA, he has held a wide range of technology and leadership positions, including serving as VP and general manager of the wafer inspection division. In 1994 he was named CTO. He was previously SVP of technology at Tokyo Electron Limited. He holds approximately 50 patents in areas of inspection and metrology.

Tsai received his bachelor’s degree in electrical engineering from the National Taiwan University, and his master’s degree and doctorate in electrical engineering from the University of Illinois at Urbana-Champaign.


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KLA

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KLA develops industry-leading equipment and services that enable innovation throughout the electronics industry. They provide advanced process control and process-enabling solutions for manufacturing wafers and reticles, integrated circuits, packaging, printed circuit boards and flat panel displays. In close collaboration with leading customers across the globe, their expert teams of physicists, engineers, data scientists and problem-solvers design solutions that move the world forward.


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