Ben Tsai

Ben Tsai is responsible for spearheading KLA’s technology roadmap, strategic technology sourcing, corporate alliances and venture investments.

In over 20 years at KLA, he has held a wide range of technology and leadership positions, including serving as VP and general manager of the wafer inspection division. In 1994 he was named CTO. He was previously SVP of technology at Tokyo Electron Limited. He holds approximately 50 patents in areas of inspection and metrology.

Tsai received his bachelor’s degree in electrical engineering from the National Taiwan University, and his master’s degree and doctorate in electrical engineering from the University of Illinois at Urbana-Champaign.