Allen Lu

Dr. Allen Lu is President and Chief Executive Officer of Mattson Technology. Dr. Lu joined Mattson Technology in June 2016 and in October 2016 was appointed as President and Chief Executive Officer.

Dr. Lu is an industry veteran with diverse experiences in technology, manufacturing, business and management. Prior to joining Mattson Technology, Dr. Lu was Vice President of SEMI and President of SEMI China, where he transformed SEMICON China into the largest global platform for connecting the semiconductor manufacturing supply chain. Prior to that, Dr. Lu served as the China Fab Program Manager for Intel’s (INTC) Technology Manufacturing and Engineering Group, Director of Intel China Public Affairs and in various management and technology roles in Intel’s California Technology and Manufacturing Group. Dr. Lu was a key member of Intel’s team driving expansion in China for manufacturing, R&D and business development. Prior to Intel, Dr. Lu was a technologist at Applied Materials (AMAT).

Dr. Lu has a Ph.D. in solid state physics from the University of Virginia, and a B.Sc. from the University of Science and Technology of China.