Russell Low

Dr. Russell Low became Axcelis’ CEO in May 2023. Dr. Low joined Axcelis in October 2016, first serving as Executive Vice President, Engineering and then as Executive Vice President, Global Customer and Engineering Operations effective January 2021. Prior to joining the Company, Dr. Low held the position of Vice President of Engineering, MOCVD Business Unit at Veeco Instruments since 2013, prior to which he was Veeco’s Senior Director of Engineering, Molecular Beam Epitaxy Business Unit beginning in 2012.

From 2003 to 2012, Dr. Low held a number of positions at Varian Semiconductor Equipment Associates, most recently as Director of Technology. Prior to that, Dr. Low held engineering positions in the thermal processing and ion implant divisions of Applied Materials, Inc. Dr. Low received his Ph.D. in Physical Chemistry from Oxford University. He also holds an Executive MBA from the Massachusetts Institute of Technology, a BS degree from Southampton University, and is a Visiting Fellow at Stanford University. He has 44 granted US patents over multiple categories and has authored over 20 refereed papers.