Michael L. Alles

Dr. Alles received the B.S.E.E., M.S.E.E, and Ph.D. degrees in electrical engineering from Vanderbilt University, Nashville, TN, in 1997, 2000, and 2002, respectively. He is a Senior Research Engineer with the Institute for Space and Defense Electronics, and Research Associate Professor of Electrical Engineering at Vanderbilt University. He spent two years with Silvaco International, ten years with Ibis Technology Corporation, and one year with Harris Semiconductor. He has served on the SIA ITRS starting materials working group since 1999, chairing the 2001 SOI materials group. His background includes semiconductor technology, silicon and SOI wafer manufacturing and metrology, computer-aided design tools for semiconductor fabrication processes, devices and integrated circuit design, and expertise in simulation of radiation effects in semiconductor devices and circuits.