Xitong Chen

Xitong Chen is currently a Staff Process Engineer at Lam Research, where they lead process engineering research and development for ALD/CVD metallization, spearheading collaborations with cross-functional teams to develop next-generation semiconductor tools. With over seven years of hands-on experience in microfabrication and process development, including expertise in reactive ion etching and statistical data analysis, Xitong enhances process transfer to high-volume manufacturing while improving throughput and defect rates. Xitong earned a PhD in Chemistry from the University of California, Riverside, where they conducted research on solid-state metal sulfide semiconductors and managed laboratory operations. Prior to this, they held positions as a wafer fab process engineer at Enablence Technologies and as a graduate research assistant at the University of California, Riverside.