Thomas Kenny

Thomas Kenny is the Richard W. Weiland Professor in Mechanical Engineering. In 1994 he joined the Department of Mechanical Engineering. His group is researching fundamental issues and applications of micromechanical structures. These devices are usually fabricated from silicon wafers using integrated circuit fabrication tools. Because this research field is multidisciplinary in nature, work in this group is characterized by strong collaborations with other departments, as well as with local industry. Kenny worked at the NASA Jet Propulsion Laboratory from 1989 to 1993, where his research focused on the development of electron-tunneling high-resolution microsensors. He is a member of Bio-X. Kenny is a founder of Cooligy, Inc., a microfluidics chip cooling components manufacturer, and serves on the Board of Directors of SiTime Corporation (2004 - Present). He received the BS degree in physics from the University of Minnesota, Minneapolis and the MS and PhD in physics from the University of California, Berkeley. He is a fellow of ASME.