Jay Chen

Jay Chen, Ph.D. is VP Engineering at Lyncean Technologies, Inc. He received his doctoral degree in Physics in 1990 from Colorado State University. Most of his career has been in the semiconductor equipment industry with focus on metrology technologies and products. He started at Thermawave in 1994 as a scientist and grew into a program/project manager, helping develop the highly successful Opti-Probe product line. He joined KLA-Tencor’s FAST division in 2003, managing the System Engineering team. His effort was instrumental for the development of the Aleris product line which was a huge success. All major semiconductor fabs adopted it for their metrology applications including thin film and CD (Critical Dimension). Afterwards, he moved on to ASML Brion division in 2012, built and managed the system engineering group for the development of application products to optimize patterning performance of DUV and EUV lithography systems. He brings 20+ years of capital equipment development experience to lead the Lyncean engineering team for the development of the most advanced EUV source for Lithography applications, the Compact EUV Source (CES).